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VCM 600 V5 Desktop Vacuum Evaporator
VCM600 V5 is a robust, fast, powerful and simple
to operate desktop Vacuum Thermal Evaporation System.
Industrial grade design and construction with standard, state of the
art, industrial components not software depended, with no parts
obsolescence or PLC bugs, guarantee many years of trouble free
operation.
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The tall glass vacuum chamber
and the excellent geometry of the system,
support the creation
of thin films of metals or other materials on your samples, placed on supplied substrate
holder, with high uniformity, min 95% on dia=10cm substrate, or min 92%
on the optional dia=20cm substrate.
The soft control of heating current intensity allow the fine control of
source's temperature.
FEATURES
• Compact Desktop System
• TWO (2x) High Temperature thermal sources,
1800C, independent driven, co-evaporation
• Cross contamination shields • Ultra High Grade Aluminum Base plate • Glass Vacuum chamber (Dia=12" High=19") • Metallic protection grid. • High Vacuum Turbo Pump (80l/s) with TURBO Pump Protection well
• FULL informative TURBO
pump controller
for detailed information and full control on
Turbo pump parameters
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1000-5.0x10-9 hPa Pirani-Cold Plasma Penning
compact head
vacuum measuring system
• FULL informative controller for compact
Pirani - Cold Plasma Penning head
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Heating power control unit (PCU) with:
- 2x high current AC power supply
150A continuous, 200A flash evaporation
- 2x Soft, thyristor, 0-100% current control
- 2x analog current meter
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SQM 160, 2CH, thickness monitoring system, with ONE quartz crystal head (water cooled)
• Substrate holder, SS, circular form, D=10cm • Substrate rotation 0-40 rpm • Substrate holder stereotactic system (SS) • Adjustable source-Substrate holder distance •
2x Electromagnetic shutters with
adjustable shutter position • Safety interlocks (User, Turbo, source, SQM) • Vent Valve • Oil
type, rough pump, two stage, 100l/min • Power Control Unit 110 or 220VAC / 50-60 Hz
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Base pressure < 5.0x10-6 hPa
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The, included in the system, wet type rough pump, is placed on the floor
by the desk of the
evaporator to avoid vibrations. This pump is connected to the appropriate port at the
back side of VCM600 and has
high pumping speed 100l/min for short pump down time and ultimate vacuum of 5.0x10-3 hPa.
This pump is controlled from VCM 600.
The glass bell jar is made from
ultra high quality
borosilicate glass, manufactured under very strict specifications
APPLICATIONS
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Metal contact layer on substrates
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Perovskite Solar Cells thin films
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Organic LED
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Metallization on parts
OPTIONS
DRY rough pump , Substrate heating (PID ) up 600oC,
more evaporation sources,
Shutters,
extra power module for co-evaporation, Second LTE source for Organic
materials.
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For all units, a
full set of options is offered (at extra cost). |
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