tecuum AG, low cost vacuum evaporators applied
vacuum
technology
Home About Us Products Customers Support News Videos Contact
     
Products 
VCM600 V1
VCM600 V2
VCM600 V2 SS
VCM600 V3
VCM600 V3 rack
VCM600 V3 rack Glove Box
VCM600 V4
VCM600 V5
VCM600-300
2TSin-2LTin-SQM
Srot1-Esh
VCM600-300
2TSsq-LT1-SQM
Srot1-Esh
VCM600-300-SS
2TSsq-
SQM-Sh2
Srot1-1Esh
VCM600 SP3 rack
EVP 3030
Organic Sources PID ( SET)
VCM600 BASIC
OPTIONS
VCM 600 V3 RACK
Vacuum Evaporator

VCM 600 V3 RACK is a "Plug and Play", powerful, robust, fast, simple and versatile vacuum thermal evaporation system.
This RACK type vacuum evaporator with the incorporated "high power version" of the power supply, allow the use of thermal sources asking 300A or more current intensity supporting the evaporation of large quantities of metals or other materials for the production of thin and thick films.

The tall glass vacuum chamber and the excellent geometry of the system, support the creation of thin films of metals or other materials on your samples, placed on supplied substrate holder, with high uniformity, min 95% on dia=10cm substrate, or min 92% on the optional dia=20cm substrate.

VCM600 - V3 RACK system offer
- Two evaporation sources
   for sequential or co-evaporation
- SQM-160 2ch quartz crystal thickness
  monitor with one water cooled crystal head
- Manual shutter

The soft control of the current intensity allow the fine control of source's temperature.
VCM600 V3 RACK
The compact RACK type unit incorporates:

- TWO thermal sources with (4x) high current OFHC cooper feedthroughs
   for sequential or co-evaporation
- High grade aluminum base plate with (8x) 1 inch ports (3x free)
- Vacuum chamber pumping port, NW 100, with protection grid
- High vacuum TURBO Pump (80l/s - 100l/s)
- TURBO Protection well
- FULL informative TURBO pump controller for detailed information and
    full control on Turbo pump parameters

- 1000 - 5.0x10-9 hPa vacuum measuring system with:
    Pirani - Cold Plasma Penning compact head

    FULL informative controller for Pirani - Cold Plasma Penning head
- PYREX  bell jar (dia=12'', high=18")
- Bell jar protection metallic cover (grid)
- Heating power control unit (PCU) with:
    2x high current AC power supply 250A continuous (300A short time)
    2x 0-100% filament or boat current control
    2x current Meter
    2X power protection Interlock
    Max filament temperature 1800 Celsius (Tungsten)
- Substrate holder, Stainless steel, circular form with dia=10cm with sample holders
- Substrate holder stereotactic system, 4 rods, circular rod holder, Stainless steel
- Adjustable source - Substrate holder distance, min=15cm
- Manual shutter with adjustable shutter position

- Vent valve (manual)
- Wet type rough pump, pumping speed 80l/min, ultimate vacuum 5.0x10-3 hPa
- Primary pump (rough pump), control switch, operation indicator, power socket
- Water line connectors (input-output)
- Water line interlock
- Power 110/220 Vac - 50/60Hz

Base pressure
• 5.0x10-6 hPa with Standard (80l/s -100l/s) turbomolecular pump
• 1.0x10-6 hPa with optional 300l/s high power turbomolecular pump

The glass bell jar is made from ultra high quality borosilicate glass, manufactured under
very strict specifications

For all units, a full set of options is offered (at extra cost).

tecuum ag www.tecuum.com
sales@tecuum.com
Gertrudstrasse 1
8400 Winterthur
Switzerland