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applied vacuum technology |
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VCM 600 V3_GB Rack type Vacuum Evaporator for Glove Box (GB) |
can be attached to existing glove box Special tools provided |
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VCM 600 V3_GB, is a special thermal evaporator, designed to be attached to a glove box. The SS vacuum chamber and the instruments rack, are both, placed UNDER the glove box. No chamber INSIDE the GB. Only a flat SS door is placed on the bottom plane INSIDE the GB. The whole GB volume is free. The cylindrical vacuum chamber is attached OUTSIDE the GB, to the under surface of the GB bottom plane, using a special adapter to secure tightness. A SS door with glass viewport is placed on the chamber sidewall. The evaporator is loaded and cleaned, from atmospheric side, through this SS door. INSIDE the GB, on the bottom plane, exist a second SS door. Via this door the user have access to the substrate holder for loading / unloading the samples and venting the chamber with GB gas. |
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The tall stainless steel vacuum chamber and the excellent
geometry of the system, support the creation of thin films of metals or
other materials on your samples, placed on supplied substrate holder,
with high uniformity, min 95% on dia=10cm substrate, or min 92% on the
optional dia=20cm substrate. The "high power version" of each of the two individual Power supplies, deliver 300A (350A short time) for thin and thick films formation.
The all SS vacuum chamber incorporates: |
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Base pressure • 5.0x10-6 hPa with Standard (80l/s -100l/s) turbomolecular pump • 1.0x10-6 hPa with optional 300l/s high power turbomolecular pump |
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For all units, a full set of options is offered (at extra cost). |
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| tecuum ag |
www.tecuum.com sales@tecuum.com |
Gertrudstrasse 1 8400 Winterthur Switzerland |