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applied vacuum technology |
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EVP3030 "The classical" Rack Type, Vacuum Evaporator |
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EVP3030 is a robust, fast, powerful,and simple to operate Vacuum
Thermal Evaporation System. EVP3030 system offer - One evaporation source - Electromagnetic shutter - SQM-160 2ch Quartz Crystal Thickness Monitor with one water cooled crystal head It allows the creation of high uniformity (min 95%) thin films of metals (or other materials) on substrates up to 10cm dia, (opt. 20cm) The compact,rack type, unit incorporates: - ONE thermal source with High Current OFHC Cooper Feedthroughs ( 2x ) - High Grade Aluminum Base plate with 6 x 1 inch ports ( 4 free ) - Vacuum chamber pumping port, NW 100, with protection grid - High Vacuum TURBO Pump (80 l/s) - TURBO Protection well - FULL informative TURBO pump Controller for full control of Turbo pump parameters - 1000 - 5.0 x 10-9 hPa Vacuum Measuring System with Pirani - Cold Plasma Penning Head and FULL informative Controller - PYREX Bell Jar (dia=12'', high=18") - Bell Jar Protection Metallic Cover (grid) - Heating Power Control Unit with: High Current AC Power Supply 150A continuous (200A short time) |
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0-100% filament or boat Current control Current Meter Power protection Interlock Max Filament Temperature 1800 Celsius (Tungsten) - Substrate holder, Stainless Steel, circular form with dia=10cm with sample holders - Substrate holder stereotactic system with 4 rods, circular rod holder, Stainless Steel - Vent Valve (Manual) - Wet type primary pump, pumping speed 80 l/min, ultimate vacuum 5.0 x 10-3 hPa - Primary pump (rough pump) Control Switch, Operation indicator, Power Socket - Electromagnetic shutter - SQM-160 2ch Quartz Crystal Thickness Monitor with ONE water cooled crystal head - Water line connectors (input-output) - Safety interlocks for turbo, thickness monitor and filament protection. - Power 110/220 VAC - 50/60Hz Base pressure • 5.0 x 10-6 hPa with Standard (80 l/s) Turbomolecular pump • 1.0 x 10-6 hPa with optional 300 l/s High Power Turbomolecular pump The Glass Bell Jar is made from Ultra High Quality Borosilicate Glass, manufactured under very strict specifications. For all units, a full set of options is offered (at extra cost). |
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tecuum ag |
www.tecuum.com sales@tecuum.com |
Gertrudstrasse 1 8400 Winterthur Switzerland |