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VCM 600_SP3_SS
3x Thermal sources Rack Vacuum Evaporator

VCM 600_SP3_SS is a "Plug and Play", powerful, robust, fast, simple and versatile vacuum thermal evaporation system.

This RACK type vacuum evaporator has three individually controlled thermal sources for sequential and co-evaporation. Three separate power supplies offer 150A or 200A current intensity for the evaporation of large quantities of metals or other materials for the production of thin and thick films.

The tall vacuum chamber, from stainless steel or glass, and the excellent geometry of the system, support the creation of thin films of metals or other materials on your samples, placed on the supplied substrate holder, with high uniformity, min 95% on dia=10cm substrate, or min 92% on the optional dia=20cm substrate.

The compact RACK type unit incorporates:
- THREE separate thermal sources with
    (6x) high current OFHC cooper feedthroughs
sequential or co-evaporation
- High grade aluminum base plate with
    (3x) 1 inch ports free
- Vacuum chamber pumping port, NW 100,
    with protection grid
- High vacuum TURBO pump (80l/s - 100l/s)
- TURBO pump protection well
- FULL informative TURBO pump controller for
    detailed information and full control on Turbo
    pump parameters

- 1000 - 5.0x10-9 hPa Pirani-Penning
Vacuum Measuring System with:
    Pirani - Cold Plasma Penning compact head

    FULL informative controller for Pirani - Cold
    Plasma Penning head
- Stainless steel vacuum chamber with  large
    glass window. The  cahmber has dia=30cm
    and high=45cm. A manual lifting
    used for the movement of the chamber
- SQM-160, 2ch quartz crystal thickness
    monitoring system with one water cooled
    crystal head

- Heating power control unit (PCU) with:
    3x high current AC power supply 
        150A continuous (200A short time)
    3x 0-100% filament or boat current control
    3x current meter
    3x power protection Interlock
    Max filament temperature 1800 Celsius
- Substrate holder, Stainless steel, circular
    form with dia=10cm with sample holders
- Substrate holder stereotactic system, 4 rods,
    circular rod holder, Stainless Steel
- Adjustable source - Substrate holder distance,
- Manual shutter with adjustable shutter position

- Vent valve (manual)
- Wet type rough pump, with pumping speed
    80l/min and ultimate vacuum 5.0x10-3 hPa
- Primary pump (rough pump), control switch,
   pperation indicator, power socket
- Water line connectors (input-output)
- Water line interlock
- Power 110/220 Vac - 50/60Hz

VCM 600_SP3_Glass

This system has the same specifications as above and delivered with glass vacuum chamber without lifting mechanism, to cover lower budgets.

The glass bell jar is made from ultra high quality borosilicate glass, manufactured under very strict specifications

A bell jar protection metallic cover (grid) supplied


Three separate thermal sources

Base pressure
• 5.0x10-6 hPa with Standard (80l/s -100l/s) turbomolecular pump
• 1.0x10-6 hPa with optional 300l/s high power turbomolecular pump
For all units, a full set of options is offered (at extra cost).  

tecuum ag www.tecuum.com
Gertrudstrasse 1
8400 Winterthur