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VCM 600 V2 -
SS
Desktop Vacuum Evaporator
VCM 600 V2 is a "Plug and
Play", robust, fast,
powerful, simple and versatile vacuum thermal evaporation system.
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A stainless steel vacuum
chamber with a large glass window provided. The chamber, is moved up and
down manually, via a weight reduction mechanism.
The tall stainless teel vacuum chamber and the excellent
geometry of the system, support the creation of thin films of metals or
other materials on your samples, placed on supplied substrate holder,
with high uniformity, min 95% on dia=10cm substrate, or min 92% on the
optional dia=20cm substrate.
The provided manual shutter allow thickness control of the thin film.
The soft control of the current intensity allow the fine control of
source's temperature.
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The metallic compact Desktop system incorporates:
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- ONE thermal source with (2x)
high
current OFHC cooper feedthroughs
- High
grade aluminum base plate with (6x) 1 inch ports (3 free)
- Vacuum chamber pumping port, NW 100, with protection grid
- High vacuum TURBO Pump (80l/s -100l/s)
- TURBO protection well
- FULL informative TURBO pump controller for detailed information
and
full control on Turbo pump parameters
- 1000 - 5.0x10-9 hPa
vacuum measuring system
with:
Pirani
- Cold Plasma Penning compact head
FULL informative controller for
the Pirani - Cold Plasma Penning head
- Stainless steel vacuum chamber with dia=30cm and
high=45cm
with assisted manual moving mechanism
- Glass window attached on the side of the SS vacumm chamber.
- Heating power control unit (PCU) with :
High current AC power supply 150A continuous (200A short time)
0-100% filament or boat current control,
current meter
Power protection Interlock
Max filament temperature 1800 Celsius (Tungsten)
- Substrate holder, Stainless steel, circular form with dia=10cm with sample
holders
- Substrate holder stereotactic system, 4 rods, circular rod holder, Stainless
steel
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Adjustable source - Substrate holder distance min=15cm
- Manual shutter with adjustable shutter position
- Vent valve (manual)
- Primary pump (rough pump), control switch, operation indicator,
power socket
- Vacuum connection port to primary pump
- Water line connectors (input-output)
- Power 110/220 Vac - 50/60Hz
Not incorporated
(included in delivery)
- Wet type rough pump, pumping speed 80l/min, ultimate vacuum
5.0x10-3 hPa
Base pressure
• 5.0x10-6 hPa with Standard (80l/s -100l/s)
turbomolecular pump
• 1.0x10-6 hPa with
optional 300l/s high power turbomolecular pump
The, included in the system, wet type rough pump, is placed on the floor
by the desk of the
evaporator to avoid vibrations. This pump is connected to the appropriate port at the
back side of VCM600 and has
high pumping speed 83l/min for short pump down time and ultimate vacuum of 5.0x10-3 hPa.
This pump is controlled from VCM 600.
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For all units, a full set of
options is offered (at extra cost). |
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