VCM600-300-2TSin-2LT2-SQM-Srot1-Esh Desktop Vacuum Evaporator
VCM600-300-2TSin-2LT2-SQM-Srot1-Esh
is a robust, fast, powerful and simple to operate desktop Vacuum Thermal
Evaporation System.
Industrial grade design and construction with standard, state of the
art, industrial components not software depended, with no parts
obsolescence or PLC bugs, guarantee many years of trouble free
operation.
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The tall glass vacuum chamber
and the excellent geometry of the system, support the creation of thin
films of metals or other materials on your samples, placed on supplied
substrate holder, with high uniformity, min 95% on dia=10cm substrate, or
min 92% on the optional dia=20cm substrate.
FEATURES • Compact Desktop System
• TWO (2x) High Temperature thermal sources,
1800C, independent driven, co-evaporation
• TWO (2x) Low Temperature Evaporation (LTE)
10cc crucible, independent driven,
co-evaporation, 600C, PID controlled, Type K TC, for OLED, Perovskites, OFET
•
Heating power control unit (PCU) with:
a) High Power thermal sources
- 2x high current AC power supply
150A continuous, 200A flash evaporation
- 2x Soft, thyristor, 0-100% current control
- 2x analog current meter
b) LTE Low Temp crucible sources
- 2x PID, phase controlled, power
supplies
• Cross contamination shields • Ultra High Grade Aluminum Base
plate • Glass Vacuum chamber (Dia=12" High=19") • Metallic protection grid. • High
power Turbo Pump (300l/s) with TURBO Pump Protection well
• FULL informative TURBO
pump controller for
detailed information and full control on Turbo
pump parameters •
1000-5.0x10-9 hPa vacuum measurement
with
- Pirani-Cold Plasma Penning compact head
- FULL informative head controller
• SQM 160, 2CH, thickness monitoring system, with ONE quartz crystal head (water cooled) • Substrate holder, SS, circular form, D=10cm
accept Standard Deposition masks (OLED) • Substrate rotation 0-40 rpm • Substrate holder stereotactic system (SS) • Adjustable source-Substrate holder distance • Electromagnetic shutter (adjustable position) • Safety interlocks (User, Turbo, source, SQM) • Vent Valve • Oil
type, rough pump, two stage, 100l/min • Power Control Unit 110 or 220VAC / 50-60 Hz
• Base pressure < 1.0x10-6 hPa
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The, included in the system, wet type rough pump, is placed on the floor
by the desk of the
evaporator to avoid vibrations. This pump is connected to the appropriate port at the
back side of VCM600 and has
high pumping speed 100l/min for short pump down time and ultimate vacuum of 5.0x10-3 hPa.
This pump is controlled from VCM 600.
The glass bell jar is made from
ultra high quality
borosilicate glass, manufactured under very strict specifications
APPLICATIONS
•
Metal contact layer on substrates
•
Perovskite Solar Cells thin films
•
Organic LED
•
Metallization on parts
OPTIONS
DRY rough pump , Substrate heating (PID ) up 600oC,
more evaporation sources,
Shutters,
extra power module for co-evaporation, Second LTE source for Organic
materials.
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