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Organic Evaporation Sources
with PID Temperature controller |
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This is a very compact, complete
evaporation station with two thermal sources (with shutters or
not), substrate holder, substrate shutter and PID temperature
controller. The PID controller allow
very accurate temperature control up to 500 Celsius. The system
allow sequential evaporation.
For co-evaporation, a second PID
Temperature controller is needed.
All parts can be attached to CF150 or
CF200 SS chamber.
The evaporator offered
complete with
- 2x thermal sources (2x shutters option)
- PID temperature controller (robust, accurate) for sequential
evaporation
- Vacuum chamber SS
This special SS chamber has one CF150 SS door with glass window, on
the one side of
the chamber. Through this door user can serve the evaporation
process. A second CF100
port with protection grid, support the Turbo pump.
- Turbo pump with controller
- Rough pump
-
1000 - 5.0x10-9 hPa Pirani-Penning Vacuum measuring system
with controller
- Substrate holder (rotation option)
- Substrate shutter (manual)
- A compact Instruments Box is used for all electronic
controllers (to be placed nearby)
An optional thickness monitor can
be installed at later time. |
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