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VCM600-300-SS-2TSsq-SQM-Sh2-Srot1-Esh
Desktop Vacuum Evaporator
VCM600-300-SS-2TSsq-SQM-Sh2-Srot1-Esh
is a robust, fast, powerful and simple to operate desktop Vacuum Thermal
Evaporation System.
Industrial grade design and construction with standard, state of the
art, industrial components not software depended, with no parts
obsolescence or PLC bugs, guarantee many years of trouble free
operation.
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The tall glass vacuum chamber
and the excellent geometry of the system, support the creation of thin
films of metals or other materials on your samples, placed on supplied
substrate holder, with high uniformity, min 95% on dia=10cm substrate, or
min 92% on the optional dia=20cm substrate.
FEATURES
• Compact Desktop System
• TWO High Temperature thermal sources,
1800C for boats or filaments for
sequential evaporation
• Cross contamination shields
• Ultra High Grade Aluminum Base plate
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Stainless Steel Vacuum chamber
(Dia=12" High=19") with viewport and
manual assisted lifting mechanism
• High Vacuum Turbo Pump (300l/s) with
TURBO Pump Protection well
• FULL informative TURBO
pump controller for
detailed information and full control on Turbo
pump parameters
•
1000-5.0x10-9 hPa Pirani-Cold Plasma Penning
compact head
vacuum measuring system
• FULL informative controller for
compact
Pirani - Cold Plasma
Penning head
• SQM 160, 2CH, thickness monitoring system,
with ONE quartz crystal head (water cooled)
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Heating power control unit (PCU) with:
- High current AC power supply 150A cont.
(200A flash evaporation)
- Soft, SCR (thyristor) 0-100% thermal current
control, analog current meter
- High current thermal source selection switch
- Operation Ch1 or Ch2 typ 150A max 200A,
Ch1 + Ch2 typ 75A max 100A
- Power protection Interlock
- Max filament temperature 1800 Celsius
• Substrate holder, SS, circular form, D=10cm
• Substrate holder heating facility with PID
controller up to 350 Celsius
• Substrate rotation 0-40 rpm
• Substrate holder stereotactic system (SS)
• Electromagnetic shutter (adjustable position)
• Safety interlocks (User, Turbo, source, SQM)
• Vent Valve
• Oil
type, rough pump, two stage, 100l/min
• Power Control Unit 110 or 220VAC / 50-60 Hz
• Base pressure < 1.0x10-6 hPa
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The, included in the system, wet type rough pump, is placed on the floor
by the desk of the
evaporator to avoid vibrations. This pump is connected to the appropriate port at the
back side of VCM600 and has
high pumping speed 100l/min for short pump down time and ultimate vacuum of 5.0x10-3 hPa.
This pump is controlled from VCM 600.
The glass bell jar is made from
ultra high quality
borosilicate glass, manufactured under
very strict specifications
APPLICATIONS
•
Metal contact layer on substrates
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Perovskite Solar Cells thin films
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Organic LED
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Metallization on parts
OPTIONS
DRY rough pump , Substrate heating (PID ) up 600oC,
more evaporation sources,
Shutters,
extra power module for co-evaporation, Second LTE source for Organic
materials.
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For all units, a full set of
options is offered (at extra cost). |
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