tecuum AG, low cost vacuum evaporators MRS2023 applied
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VCM600 V1
VCM600 V2
VCM600 V2 SS
VCM600 V3
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VCM600 V3 rack Glove Box
VCM600 V4
VCM600 V5
VCM600 SP3 rack
EVP 3030
Organic Sources PID ( SET)
VCM 600 V4
Desktop Vacuum Evaporator

VCM 600 V4 is a "Plug and Play", robust, fast, powerful, simple and versatile vacuum thermal evaporation system.

The tall glass vacuum chamber and the excellent geometry of the system, support the creation of thin films of metals or other materials on your samples, placed on supplied substrate holder, with high uniformity, min 95% on dia=10cm substrate, or min 92% on the optional dia=20cm substrate.

VCM600 - V4 system offer
- Two evaporation sources with selection
  switch for sequential or co-evaporation
- Substrate holder rotation 0-40 rpm
- Electromagnetic shutter
- SQM-160 2ch quartz crystal thickness
  monitor with one water cooled crystal head

The soft control of the current intensity allow the fine control of source's temperature.

VCM 600 V4

The metallic compact Desktop system  incorporates:

- TWO thermal sources with (4x) high current OFHC cooper feedthroughs
   for sequential or co-evaporation
- High Grade Aluminum Base plate with (8x) 1 inch ports (2x free)
- Vacuum chamber pumping port, NW 100, with protection grid
- High vacuum TURBO Pump (80 l/s -100 l/s)
- TURBO protection well
- FULL informative TURBO pump controller for detailed information and
    full control on Turbo pump parameters

- 1000 - 5.0x10-9 hPa vacuum measuring system with:
    Pirani - Cold Plasma Penning compact head
    FULL informative controller for Pirani - Cold Plasma Penning head
- SQM-160, 2ch quartz crystal thickness monitorimg system
    with one water cooled crystal head

- PYREX  bell jar (dia=12'', high=18")
- Bell jar protection metallic cover (grid)
- Heating power control unit (PCU) with:
    High current AC power supply 150A continuous (200A short time)
    0-100% filament or boat current control, current meter
    High current thermal source selection switch
    Power protection Interlock
    Max filament temperature 1800 Celsius (Tungsten)
- Substrate holder, Stainless steel, circular form with dia=10cm with sample holders
- Substrate holder stereotactic system, 4 rods, circular rod holder, Stainless steel
- Adjustable source - Substrate holder distance, min=15cm
- Electromagnetic shutter with adjustable shutter position

- Rotated substrate holder 0-40 rpm
- Vent valve (manual)
- Primary pump (rough pump), control switch, operation indicator, power socket
- Vacuum connection port to primary pump
- Water line connectors (input-output)
- Water line interlock
- Power 110/220 Vac - 50/60Hz

Not incorporated (included in delivery)
- Wet type rough pump, pumping speed 80l/min, ultimate vacuum
5.0x10-3 hPa

Base pressure
• 5.0x10-6 hPa with Standard (80l/s -100l/s) turbomolecular pump
• 1.0x10-6 hPa with optional 300l/s high power turbomolecular pump

The, included in the system, wet type rough pump, is placed on the floor by the desk of the
evaporator to avoid vibrations. This pump is connected to the appropriate port at the back side of VCM600 and has high pumping speed 83l/min for short pump down time and ultimate vacuum
of 5.0x10-3 hPa. This pump is controlled from VCM 600.

The glass bell jar is made from ultra high quality borosilicate glass, manufactured under
very strict specifications

For all units, a full set of options is offered (at extra cost).  

tecuum ag www.tecuum.com
Gertrudstrasse 1
8400 Winterthur